Invention Grant
US07718113B2 Gas delivery substrate 有权
气体输送基板

Gas delivery substrate
Abstract:
A gas delivery substrate and method of manufacture is disclosed. A thermoplastic extrusion compound is created comprising a ceramic material and a thermoplastic resin, a green body is formed by thermoplastic extrusion of the compound, and the green body is sintered to form the gas delivery substrate. Such gas delivery substrates may be thin walled, highly porous and have secondary operations such as crimping and machining done prior to sintering.
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