Invention Grant
- Patent Title: Apparatus and method for high rate uniform coating, including non-line of sight
- Patent Title (中): 高速均匀涂布的装置和方法,包括非视线
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Application No.: US10512161Application Date: 2003-04-25
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Publication No.: US07718222B2Publication Date: 2010-05-18
- Inventor: Derek D. Hass , Douglas T. Queheillalt , Haydn N. G. Wadley
- Applicant: Derek D. Hass , Douglas T. Queheillalt , Haydn N. G. Wadley
- Applicant Address: US VA Charlottesville
- Assignee: University of Virginia Patent Foundation
- Current Assignee: University of Virginia Patent Foundation
- Current Assignee Address: US VA Charlottesville
- Agency: Novak Druce DeLuca + Quigg LLP
- Agent Robert J. Decker
- International Application: PCT/US03/12920 WO 20030425
- International Announcement: WO03/091473 WO 20031106
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A direct vapor deposition (DVD) apparatus and method is taught, that provides a carrier gas flow entraining vapor atoms for the coating of regions on a substrate that are not in line-of-sight. The degree of non line-of-sight (NLOS) coating, hence thickness uniformity around the substrate is a sensitive function of the flow conditions. For a fixed background pressure in the region of deposition, an increase in the uniformity of the coating thickness is accomplished as the flow velocity is reduced. This improvement in uniformity is a result of an increase in the fraction of vapor atoms which deposit in NLOS positions on the substrate such as backside (21) of fiber (65) as indicated by vapor streamlines (51). Vapor impact width (VIW) is the width of the vapor flux impacting on some area of the fiber. Front side coating (FSC) width is the vapor width of atoms impacting on the substrate frontside (22).
Public/Granted literature
- US20050255242A1 Apparatus and method for high rate uniform coating, including non-line of sight Public/Granted day:2005-11-17
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