Invention Grant
- Patent Title: Method for producing a MEMS device
- Patent Title (中): MEMS器件的制造方法
-
Application No.: US11099118Application Date: 2005-04-05
-
Publication No.: US07718457B2Publication Date: 2010-05-18
- Inventor: Thomas Chen , Michael Judy
- Applicant: Thomas Chen , Michael Judy
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method of producing a MEMS device provides an apparatus having structure on a first layer that is proximate to a substrate. The apparatus has a space proximate to the structure. The method adds doped material to the space. The doped material dopes at least a portion of the first layer.
Public/Granted literature
- US20060223291A1 Method and apparatus for producing a MEMS device Public/Granted day:2006-10-05
Information query
IPC分类:
