Invention Grant
US07718490B2 Nonvolatile semiconductor storage device and manufacturing method therefor 有权
非易失性半导体存储装置及其制造方法

Nonvolatile semiconductor storage device and manufacturing method therefor
Abstract:
A nonvolatile semiconductor storage device includes a semiconductor substrate; a plurality of isolation regions formed in the semiconductor substrate; an element-forming region formed between adjacent isolation regions; a first gate insulating film provided on the element-forming region; a floating gate electrode which is provided on the first gate insulating film and in which a width of a lower hem facing the element-forming region is narrower than a width of the element-forming region in a section taken in a direction perpendicular to a direction in which the isolation regions extend; a second gate insulating film provided on the floating gate electrode; and a control gate electrode provided on the second gate insulating film.
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