Invention Grant
- Patent Title: Semiconductor apparatus including a thin-metal-film resistor element and a method of manufacturing the same
- Patent Title (中): 包括薄金属膜电阻元件的半导体装置及其制造方法
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Application No.: US11984167Application Date: 2007-11-14
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Publication No.: US07718502B2Publication Date: 2010-05-18
- Inventor: Kimihiko Yamashita , Yasunori Hashimoto
- Applicant: Kimihiko Yamashita , Yasunori Hashimoto
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Dickstein Shapiro LLP
- Priority: JP2003-167097 20030611; JP2004-040907 20040218; JP2004-148625 20040519
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A semiconductor apparatus includes a wiring pattern, an insulating film, and a thin-metal-film resistor element. The insulating film is formed on the wiring pattern having connection holes vertically penetrating there-through to expose part of the wiring pattern at bottom regions of the connection holes. The connection holes are arranged with a space there-between. The thin-metal-film resistor element is formed on the insulating film and extending to continuously overlay and contact surfaces of the insulating film, inner walls of the connection holes, and the wiring pattern at the bottom regions of the connection holes.
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