Invention Grant
US07718531B2 Method for forming catalyst nanoparticles for growing elongated nanostructures
有权
用于形成用于生长细长纳米结构的催化剂纳米颗粒的方法
- Patent Title: Method for forming catalyst nanoparticles for growing elongated nanostructures
- Patent Title (中): 用于形成用于生长细长纳米结构的催化剂纳米颗粒的方法
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Application No.: US12146885Application Date: 2008-06-26
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Publication No.: US07718531B2Publication Date: 2010-05-18
- Inventor: Aleksandar Radisic , Philippe M. Vereecken
- Applicant: Aleksandar Radisic , Philippe M. Vereecken
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: EP07075889 20071016
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Preferred embodiments provide a method for forming at least one catalyst nanoparticle on at least one sidewall of a three-dimensional structure on a main surface of a substrate, the main surface lying in a plane and the sidewall of the three-dimensional structure lying in a plane substantially perpendicular to the plane of the main surface of the substrate. The method comprises obtaining a three-dimensional structure on the main surface, the three-dimensional structure comprising catalyst nanoparticles embedded in a non-catalytic matrix and selectively removing at least part of the non-catalytic matrix at the sidewalls of the three-dimensional structure to thereby expose at least one catalyst nanoparticle.
Public/Granted literature
- US20090072222A1 METHOD FOR FORMING CATALYST NANOPARTICLES FOR GROWING ELONGATED NANOSTRUCTURES Public/Granted day:2009-03-19
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