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US07718964B2 High time-resolution ultrasensitive optical sensor using a planar waveguide leakage mode, and methods for making same 有权
使用平面波导泄漏模式的高分辨率超灵敏光学传感器及其制造方法

High time-resolution ultrasensitive optical sensor using a planar waveguide leakage mode, and methods for making same
Abstract:
A high time-resolution ultrasensitive optical detector, using a planar waveguide leakage mode, and methods for making the detector. The detector includes a stacking with a dielectric substrate, a detection element, first and second dielectric layers, and a dielectric superstrate configured to send photon(s) into the light guide formed by the first layer. The thicknesses of the layers is chosen to enable a resonant coupling between the photon(s) and a leakage mode of the guide, the stacking having an absorption resonance linked to the leakage mode for a given polarization of the photon(s).
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