Invention Grant
US07718964B2 High time-resolution ultrasensitive optical sensor using a planar waveguide leakage mode, and methods for making same
有权
使用平面波导泄漏模式的高分辨率超灵敏光学传感器及其制造方法
- Patent Title: High time-resolution ultrasensitive optical sensor using a planar waveguide leakage mode, and methods for making same
- Patent Title (中): 使用平面波导泄漏模式的高分辨率超灵敏光学传感器及其制造方法
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Application No.: US12066388Application Date: 2006-09-25
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Publication No.: US07718964B2Publication Date: 2010-05-18
- Inventor: Laurent Frey
- Applicant: Laurent Frey
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0552923 20050928
- International Application: PCT/EP2006/066714 WO 20060925
- International Announcement: WO2007/036510 WO 20070405
- Main IPC: H01L27/18
- IPC: H01L27/18

Abstract:
A high time-resolution ultrasensitive optical detector, using a planar waveguide leakage mode, and methods for making the detector. The detector includes a stacking with a dielectric substrate, a detection element, first and second dielectric layers, and a dielectric superstrate configured to send photon(s) into the light guide formed by the first layer. The thicknesses of the layers is chosen to enable a resonant coupling between the photon(s) and a leakage mode of the guide, the stacking having an absorption resonance linked to the leakage mode for a given polarization of the photon(s).
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