Invention Grant
- Patent Title: Scanning head for optical position-measuring systems
- Patent Title (中): 光学位置测量系统的扫描头
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Application No.: US10582661Application Date: 2004-07-29
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Publication No.: US07719075B2Publication Date: 2010-05-18
- Inventor: Peter Speckbacher , Josef Weidmann , Christopher Eisele , Elmar Mayer , Reiner Burgschat
- Applicant: Peter Speckbacher , Josef Weidmann , Christopher Eisele , Elmar Mayer , Reiner Burgschat
- Applicant Address: DE Traunreut
- Assignee: Dr. Johannes Heidenhain GmbH
- Current Assignee: Dr. Johannes Heidenhain GmbH
- Current Assignee Address: DE Traunreut
- Agency: Kenyon & Kenyon LLP
- Priority: DE10357654 20031210
- International Application: PCT/EP2004/008483 WO 20040729
- International Announcement: WO2005/057668 WO 20050623
- Main IPC: H01L31/105
- IPC: H01L31/105 ; G01D5/34

Abstract:
A scanning head for an optical position-measuring system includes a receiver grating, formed of photosensitive areas, for the scanning of locally intensity-modulated light of differing wavelengths. The receiver grating is formed from a semiconductor layer stack of a doped p-layer, an intrinsic i-layer and a doped n-layer. The individual photosensitive areas have a first doped layer and at least a part of the intrinsic layer in common and are electrically separated from one another by interruptions in the second doped layer.
Public/Granted literature
- US20070278486A1 Scanning Head for Optical Position-Measuring Systems Public/Granted day:2007-12-06
Information query
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