Invention Grant
- Patent Title: Macro inspection apparatus and microscopic inspection method
- Patent Title (中): 宏观检查仪器和显微镜检查方法
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Application No.: US12327222Application Date: 2008-12-03
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Publication No.: US07719672B2Publication Date: 2010-05-18
- Inventor: Atsushi Kohayase , Mitsuru Uda
- Applicant: Atsushi Kohayase , Mitsuru Uda
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Douglas Lashmit
- Priority: JP2007-318735 20071210
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
The invention provides a macro inspection apparatus including: a stage on which an inspection object is placed; a light source that irradiates light on an upper surface of the inspection object from an angular direction arbitrarily selected relative to the upper surface of the inspection object; and a line sensor which is placed in an angular direction selected relative to the upper surface of the inspection object so that an optical axis thereof corresponds with an edge of the upper surface area irradiated by the light source and which receives reflected light from the edge of the upper surface area of the inspection object.
Public/Granted literature
- US20090147248A1 MACRO INSPECTION APPARATUS AND MICROSCOPIC INSPECTION METHOD Public/Granted day:2009-06-11
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