Invention Grant
US07719818B2 Material for forming capacitor layer and method for manufacturing the material for forming capacitor layer
失效
用于形成电容器层的材料和用于形成用于形成电容器层的材料的方法
- Patent Title: Material for forming capacitor layer and method for manufacturing the material for forming capacitor layer
- Patent Title (中): 用于形成电容器层的材料和用于形成用于形成电容器层的材料的方法
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Application No.: US11912716Application Date: 2006-04-28
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Publication No.: US07719818B2Publication Date: 2010-05-18
- Inventor: Naohiko Abe , Akiko Sugioka , Akihiro Kanno , Hirotake Nakashima
- Applicant: Naohiko Abe , Akiko Sugioka , Akihiro Kanno , Hirotake Nakashima
- Applicant Address: JP Tokyo
- Assignee: Mitsui Mining & Smelting Co., Ltd.
- Current Assignee: Mitsui Mining & Smelting Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2005-133693 20050428
- International Application: PCT/JP2006/308956 WO 20060428
- International Announcement: WO2006/118237 WO 20061109
- Main IPC: H01G4/22
- IPC: H01G4/22 ; H01G4/20 ; H01G4/005

Abstract:
An object of the present invention is to provide a material for forming a capacitor layer comprising a dielectric layer formed by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method. The material can reduce a leakage current of a capacitor circuit. In order to achieve the object, a material for forming a capacitor layer comprising a dielectric layer between a first conductive layer to be used for forming a top electrode and a second conductive layer to be used for forming a bottom electrode, characterized in that the dielectric layer is a dielectric oxide film formed by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method; and particles constituting the dielectric oxide film are impregnated with a resin component is employed. In addition, a manufacturing method characterized in that the dielectric oxide film is formed on the surface of a material to be the bottom electrode by any one of a sol-gel method, an MOCVD method, and a sputtering deposition method; a resin varnish is impregnated into a surface of the dielectric oxide film; the resin is dried and cured to form the dielectric layer; and then a top electrode constituting layer is provided on the dielectric layer is employed.
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