Invention Grant
- Patent Title: Systems and methods for cross-intrabay transport
- Patent Title (中): 跨越式运输的系统和方法
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Application No.: US11358470Application Date: 2006-02-21
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Publication No.: US07720564B2Publication Date: 2010-05-18
- Inventor: Kuo-Hua Wang , Hsing-Fu Wang
- Applicant: Kuo-Hua Wang , Hsing-Fu Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Thomas, Kayden, Horstemeyer & Risley
- Main IPC: G06F7/00
- IPC: G06F7/00

Abstract:
A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.
Public/Granted literature
- US20070198333A1 Systems and methods for cross-intrabay transport Public/Granted day:2007-08-23
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