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US07723716B2 Phase change memory device 失效
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Phase change memory device
Abstract:
There is provided a semiconductor device. The semiconductor device includes a lower electrode, a contact connected to the lower electrode to have a double trench structure, a phase change material layer accommodated in the double trench to cause a phase change between a crystalline state and an amorphous state in accordance with a change in heat transmitted by the contact, and an upper electrode connected to the phase change material layer.
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