Invention Grant
US07723768B2 Asymmetric recessed gate MOSFET and method for manufacturing the same
失效
非对称凹栅MOSFET及其制造方法
- Patent Title: Asymmetric recessed gate MOSFET and method for manufacturing the same
- Patent Title (中): 非对称凹栅MOSFET及其制造方法
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Application No.: US11130642Application Date: 2005-05-16
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Publication No.: US07723768B2Publication Date: 2010-05-25
- Inventor: Moon Sik Suh
- Applicant: Moon Sik Suh
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Townsend and Townsend and Crew LLP
- Priority: KR10-2004-0112365 20041224
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94 ; H01L21/336

Abstract:
Disclosed are an asymmetric recessed gate MOSFET, and a method for manufacturing the same. The asymmetric recessed gate MOSFET comprises: recess regions formed at a predetermined depth in a semiconductor; recessed gate electrodes formed at a predetermined height on a semiconductor substrate by gap-filling the recess regions, and misaligned with the recess region corresponding to one of the source/drain regions; spacers formed on sides of the recessed gate electrodes; and source/drain regions implanted with a dopant formed in the semiconductor substrate exposed between the spacers. The overlap between the gate electrodes and the source/drain regions can be reduced by having one of the source/drain regions misaligned with the recess regions in the recessed gate structure, and abnormal leakage current caused by consistency between an electron field max point A and a stress max pint B can be sharply reduced by changing the profile of the source/drain regions.
Public/Granted literature
- US20060138477A1 Asymmetric recessed gate MOSFET and method for manufacturing the same Public/Granted day:2006-06-29
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