Common internal electrodes 27 and segment internal electrodes 28 are laminated alternately with a piezoelectric material 29 between and a common external electrode 30 and a segment external electrode 31 are provided on the surface, forming a drive vibrator 24. A free end part 24a of the drive vibrator 24 is formed with an active region L and can be expanded and contracted in the length direction of the vibrator. A piezoelectric material 29 of the outermost layer in the free end part 24a can be operated based on the potential difference between the external and internal electrodes and a portion of the active region L in the external electrode is used as a trimming portion with an effective length x varied by trimming.