Invention Grant
- Patent Title: Method of forming a micro-electromechanical (MEMS) switch
- Patent Title (中): 形成微机电(MEMS)开关的方法
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Application No.: US11968896Application Date: 2008-01-03
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Publication No.: US07726010B2Publication Date: 2010-06-01
- Inventor: Louis C. Hsu , Lawrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
- Applicant: Louis C. Hsu , Lawrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann
- Main IPC: H01H11/00
- IPC: H01H11/00 ; H01H65/00

Abstract:
A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.
Public/Granted literature
- US20080092367A1 MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME Public/Granted day:2008-04-24
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