Invention Grant
- Patent Title: Lid opening/closing system of an airtight container
- Patent Title (中): 密封容器盖开/闭系统
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Application No.: US11563863Application Date: 2006-11-28
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Publication No.: US07726353B2Publication Date: 2010-06-01
- Inventor: Tsutomu Okabe
- Applicant: Tsutomu Okabe
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-346083 20051130; JP2006-314191 20061121
- Main IPC: B65G1/12
- IPC: B65G1/12 ; B65B31/04
Abstract:
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed, and at the same time, the inert gas is also supplied to an inside of a FOUP. Here, the direction of supply of the inert gas supplied to the inside of the FOUP is such that it does not have a flow component directing toward the gas flow forming the gas curtain. The above-mentioned structure prevents increase over time in a partial pressure of oxidizing gas in the FOUP fixed by a FIMS system in an open state.
Public/Granted literature
- US20070151619A1 LID OPENING/CLOSING SYSTEM OF AN AIRTIGHT CONTAINER Public/Granted day:2007-07-05
Information query
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