Invention Grant
- Patent Title: Method of forming a chalcogenide compound target
- Patent Title (中): 形成硫属化物化合物靶的方法
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Application No.: US11860931Application Date: 2007-09-25
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Publication No.: US07727458B2Publication Date: 2010-06-01
- Inventor: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- Applicant: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, PA
- Priority: KR10-2006-0094217 20060927
- Main IPC: C04B35/64
- IPC: C04B35/64

Abstract:
In a method of forming a chalcogenide compound target, a first powder including germanium carbide or germanium is prepared, and a second powder including antimony carbide or antimony is prepared. A third powder including tellurium carbide or tellurium is prepared. A powder mixture is formed by mixing the first to the third powders. After a shaped is formed body by molding the powder mixture. The chalcogenide compound target is obtained by sintering the powder mixture. The chalcogenide compound target may include a chalcogenide compound that contains carbon and metal, or carbon, metal and nitrogen considering contents of carbon, metal and nitrogen, so that a phase-change material layer formed using the chalcogenide compound target may stable phase transition, enhanced crystallized temperature and increased resistance. A phase-change memory device including the phase-change material layer may have reduced set resistance and driving current while improving durability and sensing margin.
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