Invention Grant
- Patent Title: Forming ferroelectric polymer memories
- Patent Title (中): 形成铁电聚合物记忆体
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Application No.: US10160641Application Date: 2002-05-31
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Publication No.: US07727777B2Publication Date: 2010-06-01
- Inventor: Ebrahim Andideh , Mark Isenberger , Michael Leeson , Mani Rahnama
- Applicant: Ebrahim Andideh , Mark Isenberger , Michael Leeson , Mani Rahnama
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
In accordance with some embodiments, a ferroelectric polymer memory may be formed of a plurality of stacked layers. Each layer may be separated from the ensuing layer by a polyimide layer. The polyimide layer may provide reduced layer-to-layer coupling, and may improve planarization after the lower layer fabrication.
Public/Granted literature
- US20030224535A1 Forming ferroelectric polymer memories Public/Granted day:2003-12-04
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