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US07727777B2 Forming ferroelectric polymer memories 有权
形成铁电聚合物记忆体

Forming ferroelectric polymer memories
Abstract:
In accordance with some embodiments, a ferroelectric polymer memory may be formed of a plurality of stacked layers. Each layer may be separated from the ensuing layer by a polyimide layer. The polyimide layer may provide reduced layer-to-layer coupling, and may improve planarization after the lower layer fabrication.
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