Invention Grant
US07727848B2 Methods and semiconductor structures for latch-up suppression using a conductive region
失效
使用导电区域进行闩锁抑制的方法和半导体结构
- Patent Title: Methods and semiconductor structures for latch-up suppression using a conductive region
- Patent Title (中): 使用导电区域进行闩锁抑制的方法和半导体结构
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Application No.: US12169806Application Date: 2008-07-09
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Publication No.: US07727848B2Publication Date: 2010-06-01
- Inventor: Toshiharu Furukawa , David Vaclav Horak , Charles William Koburger, III , Jack Allan Mandelman , William Robert Tonti
- Applicant: Toshiharu Furukawa , David Vaclav Horak , Charles William Koburger, III , Jack Allan Mandelman , William Robert Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01L21/331
- IPC: H01L21/331

Abstract:
Semiconductor structures and methods for suppressing latch-up in bulk CMOS devices. The semiconductor structure comprises first and second adjacent doped wells formed in the semiconductor material of a substrate. A trench, which includes a base and first sidewalls between the base and the top surface, is defined in the substrate between the first and second doped wells. The trench is partially filled with a conductor material that is electrically coupled with the first and second doped wells. Highly-doped conductive regions may be provided in the semiconductor material bordering the trench at a location adjacent to the conductive material in the trench.
Public/Granted literature
- US20080268610A1 METHODS AND SEMICONDUCTOR STRUCTURES FOR LATCH-UP SUPPRESSION USING A CONDUCTIVE REGION Public/Granted day:2008-10-30
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