Invention Grant
US07728318B2 Nonvolatile phase change memory cell having a reduced contact area
有权
具有减小的接触面积的非挥发性相变存储器单元
- Patent Title: Nonvolatile phase change memory cell having a reduced contact area
- Patent Title (中): 具有减小的接触面积的非挥发性相变存储器单元
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Application No.: US11560791Application Date: 2006-11-16
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Publication No.: US07728318B2Publication Date: 2010-06-01
- Inventor: Usha Raghuram , S. Brad Herner
- Applicant: Usha Raghuram , S. Brad Herner
- Applicant Address: US CA Milpitas
- Assignee: SanDisk Corporation
- Current Assignee: SanDisk Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Cooper Legal Group LLC
- Main IPC: H01L29/02
- IPC: H01L29/02

Abstract:
A nonvolatile memory cell having a contact area between a phase-change material such as a chalcogenide and a heat source which is smaller than photolithographic limits is described. To form this cell, a conductive or semiconductor pillar is exposed at a dielectric surface and recessed by selective etch. A thin, conformal layer of a spacer material is deposited on the dielectric top surface, the pillar top surface, and the sidewalls of the recess, then removed from horizontal surfaces by anistropic etch, leaving a spacer on the sidewalls defining a reduced volume within the recess. The phase change material is deposited within the spacer, having a reduced contact area to the underlying conductive or semiconductor pillar.
Public/Granted literature
- US20080116441A1 NONVOLATILE PHASE CHANGE MEMORY CELL HAVING A REDUCED CONTACT AREA Public/Granted day:2008-05-22
Information query
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