Invention Grant
US07728384B2 Magnetic random access memory using single crystal self-aligned diode
有权
使用单晶自对准二极管的磁性随机存取存储器
- Patent Title: Magnetic random access memory using single crystal self-aligned diode
- Patent Title (中): 使用单晶自对准二极管的磁性随机存取存储器
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Application No.: US11420930Application Date: 2006-05-30
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Publication No.: US07728384B2Publication Date: 2010-06-01
- Inventor: Chiahua Ho , Yenhao Shih , Hsiang-Lan Lung
- Applicant: Chiahua Ho , Yenhao Shih , Hsiang-Lan Lung
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Stout, Uxa, Buyan & Mullins, LLP
- Main IPC: H01L23/62
- IPC: H01L23/62

Abstract:
A magnetic random access memory (MRAM) cell comprises a MRAM device and a single crystal self-aligned diode. The MRAM device and the single crystal self-aligned diode are connected through a contact. Only one metal line is positioned above the MRAM device of the MRAM cell. A first and second spacers positioned adjacent to the opposite sidewalls of the contact define the size of the single crystal self-aligned diode. A first and second metal silicide lines are positioned adjacent to the first and second spacers, respectively. The single crystal self-aligned diode, defined in a silicon substrate, includes a bottom implant (BI) region and a contact implant (CI) region. The CI region is surrounded by the BI region except for a side of the CI region that aligns the surface of the silicon substrate. A fabrication method, a read method, two programming methods for the MRAM cell are also disclosed.
Public/Granted literature
- US20070279978A1 MAGNETIC RANDOM ACCESS MEMORY USING SINGLE CRYSTAL SELF-ALIGNED DIODE Public/Granted day:2007-12-06
Information query
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