Invention Grant
- Patent Title: Semiconductor device production method and semiconductor device
- Patent Title (中): 半导体装置的制造方法及半导体装置
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Application No.: US11375212Application Date: 2006-03-15
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Publication No.: US07728445B2Publication Date: 2010-06-01
- Inventor: Taketoshi Nakamura , Hiroshi Saitoh
- Applicant: Taketoshi Nakamura , Hiroshi Saitoh
- Applicant Address: JP Shizuoka-Ken
- Assignee: Yamaha Corporation
- Current Assignee: Yamaha Corporation
- Current Assignee Address: JP Shizuoka-Ken
- Agency: Dickstein Shapiro LLP
- Priority: JPP2005-074902 20050316; JPP2005-145610 20050518
- Main IPC: H01L23/29
- IPC: H01L23/29

Abstract:
A semiconductor device production method which includes steps of: preparing a wafer on which multiple integrated circuits are formed on a principal face; forming a rewiring which is electrically connected to the integrated circuits via a pad electrode; and dicing the wafer after forming an electrode terminal on the rewiring, including steps of: forming a first resin layer by sealing at least the rewiring and the electrode terminal formed on the principal face of the wafer with a first resin; processing a first dicing from a back face of the wafer to the principal face of the wafer or halfway to the first resin layer when the first resin layer is formed; forming a second resin layer by sealing a cut line outlined upon the first dicing and the back face of the wafer continuously with a first resin; and processing a second dicing while leaving the second resin layer which covers a side face outlined upon the first dicing.
Public/Granted literature
- US20060244149A1 Semiconductor device production method and semiconductor device Public/Granted day:2006-11-02
Information query
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