Invention Grant
- Patent Title: Lamb wave type frequency device and method thereof
- Patent Title (中): 兰波型频率装置及其方法
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Application No.: US11668220Application Date: 2007-01-29
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Publication No.: US07728483B2Publication Date: 2010-06-01
- Inventor: Satoru Tanaka
- Applicant: Satoru Tanaka
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-039297 20060216; JP2006-209507 20060801
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A Lamb wave type high frequency device comprises: a piezoelectric substrate; an interdigital transducer (IDT) electrode formed on a first main surface of the piezoelectric substrates a reinforcing substrate connected to a second main surface of the piezoelectric substrate; a space portion formed in one of the piezoelectric substrate and the reinforcing substrate, an area of the space portion being larger than a region in which a Lamb wave is propagated; and a connecting surface formed in a periphery of the space portion.
Public/Granted literature
- US20070188047A1 LAMB WAVE TYPE FREQUENCY DEVICE AND METHOD THEREOF Public/Granted day:2007-08-16
Information query
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