Invention Grant
US07728966B2 Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same
有权
光学检查工具具有多个光束路径的透镜单元，用于检测基板的表面缺陷及其使用方法
- Patent Title: Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same
- Patent Title (中): 光学检查工具具有多个光束路径的透镜单元，用于检测基板的表面缺陷及其使用方法
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Application No.: US11423677Application Date: 2006-06-12
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Publication No.: US07728966B2Publication Date: 2010-06-01
- Inventor: Jong-An Kim , Dong-Chun Lee , Chung-Sam Jun , Ik-Chul Kim , Sang-Hee Kim
- Applicant: Jong-An Kim , Dong-Chun Lee , Chung-Sam Jun , Ik-Chul Kim , Sang-Hee Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2005-0064971 20050718
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
An optical inspection tool used to detect surface defects of a substrate include a chuck for holding a substrate and a lens unit disposed over the chuck. The lens unit includes at least a pair of oblique beam paths therein, wherein light penetrating the beam paths travels without angular deflection. The beam paths take the form of spaces formed through the lens unit, or flat portions formed on a lens within the lens unit. A camera is installed on the lens unit, and the camera converts light passing through the lens unit into an image. Methods of detecting surface defects of the substrate using the inspection tool are also provided.
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