Invention Grant
US07729199B2 External beam expander 失效
外部光束扩展器

External beam expander
Abstract:
The invention encompasses beam expanders and methods of using such beam expanders. A beam expander according to the present invention may advantageously be used with an interferometer. Beam expanders according to the present disclosure contain at least an input and an output lens, with the output lens having a plano-convex arrangement such that the surface of the output lens is optically flat and can be used as the reference surface in a Fizeau interferometer. The beam expander may also encompass a housing, a partially reflective coating and an anti-reflective coating.
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