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US07729587B2 Method of producing planar multimode optical waveguide using direct photopatterning 失效
使用直接光图案制作平面多模光波导的方法

Method of producing planar multimode optical waveguide using direct photopatterning
Abstract:
Disclosed is a method of producing a planar multimode optical waveguide by direct photo-patterning and, more particularly, to an optical waveguide material and a method of producing the same. It is possible to control the refractive index of the optical waveguide, and the optical waveguide has a desirable refractive index distribution throughout different dielectric regions. In the method, it is unnecessary to conduct processes of forming a clad layer and of etching a core layer, thus a production process is simplified. The method comprises coating a photosensitive hybrid material having a refractive index or a volume changed by light radiation, in a thickness of 10 microns or more, and radiating light having a predetermined wavelength onto the coated photosensitive hybrid material to form the multimode optical waveguide due to a change in refractive index of a portion onto which light is radiated.
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