Invention Grant
- Patent Title: Cooling station lifter pins
- Patent Title (中): 冷却站升降器针脚
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Application No.: US11019701Application Date: 2004-12-21
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Publication No.: US07730737B2Publication Date: 2010-06-08
- Inventor: Chao-Hsiang Fan , Te-Hsiang Liu , Chun-Kuang Liu
- Applicant: Chao-Hsiang Fan , Te-Hsiang Liu , Chun-Kuang Liu
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: F25D3/12
- IPC: F25D3/12

Abstract:
In a cooling station having lifter pins positioned within respective sockets, the lifter pins being positioned for translational movement within platform openings, the improvement comprising forming the lifter pins of aluminum or polymer. A cooling station comprising a cooling station body, a series of sockets affixed to the cooling station body a respective series of lifter pins comprised of aluminum or polymer affixed to the series of sockets, and an platform positioned on the cooling station body. The platform having respective openings positioned above the series of sockets and lifter pins for translational movement of the lifter pins into the platform openings.
Public/Granted literature
- US20060182528A1 Cooling station lifter pins Public/Granted day:2006-08-17
Information query
IPC分类: