Invention Grant
- Patent Title: Scanning probe microscope
- Patent Title (中): 扫描探针显微镜
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Application No.: US11976500Application Date: 2007-10-25
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Publication No.: US07730770B2Publication Date: 2010-06-08
- Inventor: Takeshi Ito , Masahiro Ota
- Applicant: Takeshi Ito , Masahiro Ota
- Applicant Address: JP Kyoto-shi
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto-shi
- Agent Manabu Kanesaka
- Priority: JP2006-304643 20061110
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
A scanning probe microscope scans the surface of a sample while making a cantilever to which an exploratory needle is attached oscillate near its resonance point, and collects information on the surface of the sample based on the change of oscillation due to the interaction between the surface of the sample and the exploratory needle. The scanning probe microscope includes a plurality of oscillators attached to the cantilever for oscillating the cantilever, and an oscillator drive device connected to the oscillators for selectively applying an alternating voltage for excitation to the plurality of oscillators.
Public/Granted literature
- US20080110248A1 Scanning probe microscope Public/Granted day:2008-05-15
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