Invention Grant
- Patent Title: Clean stocker and method of storing articles
- Patent Title (中): 清洁储存器和储存物品的方法
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Application No.: US11831262Application Date: 2007-07-31
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Publication No.: US07731470B2Publication Date: 2010-06-08
- Inventor: Makoto Yamamoto
- Applicant: Makoto Yamamoto
- Applicant Address: JP Kyoto-shi
- Assignee: Murata Kikai Kabushiki Kaisha
- Current Assignee: Murata Kikai Kabushiki Kaisha
- Current Assignee Address: JP Kyoto-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-207400 20060731
- Main IPC: B65G1/00
- IPC: B65G1/00

Abstract:
A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod transportation device and a reticle transportation device are elevated and lowered. Load ports, a pod opener, and the pod rotatable rack are connected by the pod transportation device. The pod opener and the reticle rotatable rack are connected by the reticle transportation device.
Public/Granted literature
- US20080023417A1 CLEAN STOCKER AND METHOD OF STORING ARTICLES Public/Granted day:2008-01-31
Information query
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