Invention Grant
- Patent Title: Method of forming a zinc oxide coated article
- Patent Title (中): 形成氧化锌涂层制品的方法
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Application No.: US11800043Application Date: 2007-05-03
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Publication No.: US07732013B2Publication Date: 2010-06-08
- Inventor: Jeffery L. Stricker , Michael B. Abrams , Roman Y. Korotkov , Gary S. Silverman , Ryan C. Smith
- Applicant: Jeffery L. Stricker , Michael B. Abrams , Roman Y. Korotkov , Gary S. Silverman , Ryan C. Smith
- Applicant Address: GB St. Helens, Merseyside US PA King of Prussia
- Assignee: Pilkington Group Limited,Arkema, Inc.
- Current Assignee: Pilkington Group Limited,Arkema, Inc.
- Current Assignee Address: GB St. Helens, Merseyside US PA King of Prussia
- Agency: Marshall & Melhorn, LLC
- Main IPC: C23C16/06
- IPC: C23C16/06
Abstract:
The invention described and claimed herein relates to a chemical vapor deposition process for depositing a zinc oxide coating on a substrate by delivering two gaseous precursor streams to a surface of the substrate, and mixing the gaseous precursor streams at the substrate surface for a time sufficiently short so as to form a zinc oxide coating at a deposition rate greater than 5 nm/second.
Public/Granted literature
- US20080057200A1 Method of forming a zinc oxide coated article Public/Granted day:2008-03-06
Information query
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