Invention Grant
US07732236B2 III nitride semiconductor crystal and manufacturing method thereof, III nitride semiconductor device manufacturing method thereof, and light emitting device
有权
III族氮化物半导体晶体及其制造方法,III族氮化物半导体装置及其制造方法以及发光装置
- Patent Title: III nitride semiconductor crystal and manufacturing method thereof, III nitride semiconductor device manufacturing method thereof, and light emitting device
- Patent Title (中): III族氮化物半导体晶体及其制造方法,III族氮化物半导体装置及其制造方法以及发光装置
-
Application No.: US10598934Application Date: 2005-05-13
-
Publication No.: US07732236B2Publication Date: 2010-06-08
- Inventor: Seiji Nakahata , Hideaki Nakahata , Koji Uematsu , Makoto Kiyama , Youichi Nagai , Takao Nakamura
- Applicant: Seiji Nakahata , Hideaki Nakahata , Koji Uematsu , Makoto Kiyama , Youichi Nagai , Takao Nakamura
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agent James W. Judge
- Priority: JP2004-147914 20040518; JP2005-117967 20050415
- International Application: PCT/JP2005/008745 WO 20050513
- International Announcement: WO2005/112080 WO 20051124
- Main IPC: H01L21/0012
- IPC: H01L21/0012

Abstract:
The invention provides Group III nitride semiconductor crystals of a size appropriate for semiconductor devices and methods for manufacturing the same, Group III nitride semiconductor devices and methods for manufacturing the same, and light-emitting appliances. A method of manufacturing a Group III nitride semiconductor crystal includes a process of growing at least one Group III nitride semiconductor crystal substrate on a starting substrate, a process of growing at least one Group III nitride semiconductor crystal layer on the Group III nitride semiconductor crystal substrate, and a process of separating a Group III nitride semiconductor crystal, constituted by the Group III nitride semiconductor crystal substrate and the Group III nitride semiconductor crystal layer, from the starting substrate, and is characterized in that the Group III nitride semiconductor crystal is 10 μm or more but 600 μm or less in thickness, and is 0.2 mm or more but 50 mm or less in width.
Public/Granted literature
Information query