Invention Grant
- Patent Title: Method for fabricating vertical CMOS image sensor
- Patent Title (中): 垂直CMOS图像传感器的制作方法
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Application No.: US11296234Application Date: 2005-12-06
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Publication No.: US07732246B2Publication Date: 2010-06-08
- Inventor: Sang Gi Lee
- Applicant: Sang Gi Lee
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney; William K. Nelson
- Priority: KR10-2004-0114603 20041229
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/265

Abstract:
A method of fabricating a vertical CMOS image sensor is disclosed, to improve the integration with the decrease in size of pixel by minimizing the lateral diffusion, in which phosphorous and arsenic ions are implanted while controlling the dose and energy, the method including forming a first photodiode in a semiconductor substrate; forming a first epitaxial layer on the semiconductor substrate; forming a first plug by sequentially implanting first and second ions in the first epitaxial layer; forming a second photodiode in the first epitaxial layer; forming a second epitaxial layer in the first epitaxial layer; forming an isolation area in the second epitaxial layer; and forming a third photodiode and a second plug in the second epitaxial layer.
Public/Granted literature
- US20060138531A1 Method for fabricating vertical CMOS image sensor Public/Granted day:2006-06-29
Information query
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