Invention Grant
US07732296B2 Method of fabricating metal-insulator-metal capacitor and metal-insulator-metal capacitor manufactured by the method
有权
通过该方法制造金属 - 绝缘体 - 金属电容器和金属 - 绝缘体 - 金属电容器的方法
- Patent Title: Method of fabricating metal-insulator-metal capacitor and metal-insulator-metal capacitor manufactured by the method
- Patent Title (中): 通过该方法制造金属 - 绝缘体 - 金属电容器和金属 - 绝缘体 - 金属电容器的方法
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Application No.: US11339151Application Date: 2006-01-25
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Publication No.: US07732296B2Publication Date: 2010-06-08
- Inventor: Jung-min Park , Seok-jun Won , Min-woo Song , Yong-kuk Jeong , Dae-jin Kwon , Weon-hong Kim
- Applicant: Jung-min Park , Seok-jun Won , Min-woo Song , Yong-kuk Jeong , Dae-jin Kwon , Weon-hong Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLp
- Priority: KR10-2005-0006779 20050125
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
In a method of fabricating a metal-insulator-metal (MIM) capacitor and a metal-insulator-metal (MIM) capacitor fabricated according to the method, the method comprises: forming an insulating-layer pattern on a semiconductor substrate, the insulating-layer pattern having a plurality of openings that respectively define areas where capacitor cells are to be formed; forming a lower electrode conductive layer on the insulating-layer pattern and on the semiconductor substrate; forming a first sacrificial layer that fills the openings on the lower electrode conductive layer; forming a second sacrificial layer on of the first sacrificial layer; planarizing the second sacrificial layer; exposing an upper surface of the lower electrode conductive layer; removing the exposed lower electrode conductive layer to form a plurality of lower electrodes that are separated from each other, each corresponding to a capacitor cell; and forming dielectric layers and upper electrodes, that are separated from each other, each corresponding to a capacitor cell, on each of the lower electrodes to provide a plurality of MIM capacitor cells constituting one capacitor to which the same electric signal is applied.
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