Invention Grant
- Patent Title: Dynamic random access memory
- Patent Title (中): 动态随机存取存储器
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Application No.: US11937502Application Date: 2007-11-09
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Publication No.: US07732849B2Publication Date: 2010-06-08
- Inventor: Shih-Wen Liu
- Applicant: Shih-Wen Liu
- Applicant Address: TW Taoyuan
- Assignee: Nanya Technology Corporation
- Current Assignee: Nanya Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Jianq Chyun IP Office
- Priority: TW96118502A 20070524
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A dynamic random access memory (DRAM) is provided. The DRAM comprises a substrate, a vertical transistor, a deep trench capacitor and a buried strap. The substrate has a trench and a deep trench located on one side of the trench thereon. The vertical transistor is disposed in the trench, a portion of which is disposed on the substrate. The deep trench capacitor is disposed in the deep trench, and comprises a bottom electrode, a capacitor dielectric layer and a top electrode. The vertical transistor comprises a gate structure disposed in the trench and above the substrate, a first doped region disposed in the substrate on sidewalls and bottom of the trench, and a second doped region disposed in the substrate on top of the trench. The buried strap is disposed in the substrate below the vertical transistor, and is adjoined to the first doped region and the top electrode.
Public/Granted literature
- US20080290389A1 DYNAMIC RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2008-11-27
Information query
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