Invention Grant
- Patent Title: Semiconductor structures with dual isolation structures, methods for forming same and systems including same
- Patent Title (中): 具有双隔离结构的半导体结构,其形成方法和包括其的系统
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Application No.: US12027697Application Date: 2008-02-07
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Publication No.: US07732885B2Publication Date: 2010-06-08
- Inventor: James M. Chapman , Salman Akram
- Applicant: James M. Chapman , Salman Akram
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A semiconductor structure with dual isolation structures is disclosed. The semiconductor structure may include a protruding isolation structure in a pixel array region of a substrate and an embedded isolation structure in a peripheral device region of the same substrate. A region of the protruding isolation structure extends from an upper surface of the substrate, while another region of the protruding isolation structure may, optionally, be embedded within the substrate. The embedded isolation structure is formed within the substrate and includes an upper surface that is substantially coplanar with the upper surface of the substrate. A method of forming the semiconductor structure with dual isolation structure is also disclosed.
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