Invention Grant
US07732885B2 Semiconductor structures with dual isolation structures, methods for forming same and systems including same 有权
具有双隔离结构的半导体结构,其形成方法和包括其的系统

Semiconductor structures with dual isolation structures, methods for forming same and systems including same
Abstract:
A semiconductor structure with dual isolation structures is disclosed. The semiconductor structure may include a protruding isolation structure in a pixel array region of a substrate and an embedded isolation structure in a peripheral device region of the same substrate. A region of the protruding isolation structure extends from an upper surface of the substrate, while another region of the protruding isolation structure may, optionally, be embedded within the substrate. The embedded isolation structure is formed within the substrate and includes an upper surface that is substantially coplanar with the upper surface of the substrate. A method of forming the semiconductor structure with dual isolation structure is also disclosed.
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