Invention Grant
US07732915B2 Semiconductor sensor device with sensor chip and method for producing the same 有权
具有传感器芯片的半导体传感器装置及其制造方法

Semiconductor sensor device with sensor chip and method for producing the same
Abstract:
A semiconductor sensor device includes a sensor chip. The sensor chip includes a sensor region and contact areas on its upper side and is further arranged in a cavity housing. The cavity housing includes side walls, a housing bottom, a cavity, external contacts on the outside of the cavity and contact pads on an upper side of the housing bottom facing the cavity. The sensor chip is embedded into a rubber-elastic plastic composition within the cavity of the cavity housing such that the sensor region of the sensor chip faces the housing bottom and the contact areas of the sensor chip are electrically connected to the contact pads on the housing bottom via elastic flip-chip contacts.
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