Invention Grant
- Patent Title: Ultra-fine area array pitch probe card
- Patent Title (中): 超细区域阵列俯仰探针卡
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Application No.: US11775732Application Date: 2007-07-10
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Publication No.: US07733102B2Publication Date: 2010-06-08
- Inventor: Hsu Ming Cheng
- Applicant: Hsu Ming Cheng
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A system and a method of testing a semiconductor die is provided. An embodiment includes a printed circuit board connected to a space transformation layer, which is connected to a substrate. The substrate uses through silicon vias and a redistribution layer to reduce the pitch of the connections beyond the historical limitations. A probe head using Cobra-style probe pins is connected to the redistribution layer through C4 bumps.
Public/Granted literature
- US20090015275A1 Ultra-Fine Area Array Pitch Probe Card Public/Granted day:2009-01-15
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