Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
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Application No.: US11473039Application Date: 2006-06-23
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Publication No.: US07733461B2Publication Date: 2010-06-08
- Inventor: Yasuhiro Kishikawa
- Applicant: Yasuhiro Kishikawa
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2005-183010 20050623; JP2006-132301 20060511
- Main IPC: G03B27/52
- IPC: G03B27/52

Abstract:
An exposure apparatus includes an illumination optical system for illuminating a reticle with exposure light, a projection optical system for projecting a pattern of the reticle onto a plate via a liquid supplied to a space between the projection optical system and the plate, a supply pipe for supplying the liquid to the space, a recovery pipe for recovering the liquid from the space, and a measuring unit for measuring a refractive index of the liquid. The measuring unit includes (i) a light source for generating a measurement light having the same wavelength as that of the exposure light, (ii) a liquid reservoir for storing the liquid, the liquid reservoir being disposed apart from the space via the supply pipe or the recovery pipe, and having a transmitting surface for transmitting the measurement light and a reflecting surface for reflecting the measurement light transmitted by the transmitting surface and the liquid in the reservoir, and (iii) a detector for detecting the measurement light reflected on the reflecting surface and transmitted by the liquid in the liquid reservoir and the transmitting surface.
Public/Granted literature
- US20060290912A1 Exposure apparatus Public/Granted day:2006-12-28
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