Invention Grant
US07733494B2 Bandwidth measuring device for high pulse repetition rate pulsed laser
有权
高脉冲重复率脉冲激光器带宽测量装置
- Patent Title: Bandwidth measuring device for high pulse repetition rate pulsed laser
- Patent Title (中): 高脉冲重复率脉冲激光器带宽测量装置
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Application No.: US11394513Application Date: 2006-03-31
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Publication No.: US07733494B2Publication Date: 2010-06-08
- Inventor: Robert J. Rafac
- Applicant: Robert J. Rafac
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method and apparatus for estimating bandwidth of laser output light is described which may include a dispersive element producing a dispersed output having a plurality of spectrum images from at least a portion of the laser output light. An array of light detecting elements is oriented to receive the dispersed output together with a shifting mechanism that moves the array, the dispersed output, or both, relative to each other. Electronics may be provided for determining the widths of at least two spectrum images at different phases of registration between the spectrum images and light detector elements and for averaging the widths to estimate a laser output bandwidth. The-spectrum images formed by the laser output light may be under-sampled, e.g., in the spatial or time domains.
Public/Granted literature
- US20070229849A1 Bandwidth measuring device for high pulse repetition rate pulsed laser Public/Granted day:2007-10-04
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