Invention Grant
- Patent Title: Exposure apparatus, method of controlling the same, and manufacturing method
- Patent Title (中): 曝光装置及其控制方法以及制造方法
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Application No.: US12099216Application Date: 2008-04-08
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Publication No.: US07733498B2Publication Date: 2010-06-08
- Inventor: Yasutomo Kurono
- Applicant: Yasutomo Kurono
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2007-112296 20070420
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An exposure apparatus comprises an optical system support supporting a projection optical system, a stage surface plate, first stage and second stages, a first interferometer configured to measure stage position in a first area, a second interferometer configured to measure stage position in a second area, a third interferometer which is interposed between the first interferometer and the second interferometer, a gap sensor configured to measure a gap between the optical system support and the stage surface plate, and a control unit configured to pass, in the swapping, the measurement result obtained by one of the first interferometer and the second interferometer to the other one of the first interferometer and the second interferometer using the measurement result obtained by the third interferometer, and to correct the passed measurement result based on the measurement result obtained by the gap sensor.
Public/Granted literature
- US20080259347A1 EXPOSURE APPARATUS, METHOD OF CONTROLLING THE SAME, AND MANUFACTURING METHOD Public/Granted day:2008-10-23
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