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US07733624B2 Method and device for electrostatic fixing of substrates with polarized molecules 有权
用极化分子静电固定底物的方法和装置

Method and device for electrostatic fixing of substrates with polarized molecules
Abstract:
Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.
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