Invention Grant
- Patent Title: Method and device for electrostatic fixing of substrates with polarized molecules
- Patent Title (中): 用极化分子静电固定底物的方法和装置
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Application No.: US12089972Application Date: 2007-03-22
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Publication No.: US07733624B2Publication Date: 2010-06-08
- Inventor: Christof Landesberger
- Applicant: Christof Landesberger
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102006013517 20060323
- International Application: PCT/EP2007/002555 WO 20070322
- International Announcement: WO2007/110192 WO 20071004
- Main IPC: H01T23/0012
- IPC: H01T23/0012

Abstract:
Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.
Public/Granted literature
- US20080232022A1 Method and Device for Electrostatic Fixing of Substrates With Polarizable Molecules Public/Granted day:2008-09-25
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