Invention Grant
US07733935B2 Nitride semiconductor laser device and method of producing the same 有权
氮化物半导体激光器件及其制造方法

Nitride semiconductor laser device and method of producing the same
Abstract:
A nitride semiconductor laser device has a semiconductor multi-layer structure that includes a lower clad layer of a first conductive type, an active layer, and an upper clad layer of a second conductive type stacked in this order on a substrate, wherein a layer under the active layer includes a stripe-like trench; the semiconductor multi-layer structure includes a stripe-like optical cavity arranged along the stripe-like trench; the stripe-like trench has a narrower width in its both end regions compared to its central main region; and the active layer is formed of a nitride semiconductor containing In.
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