Invention Grant
US07734084B2 Method and system for offset estimation and alignment 有权
偏移估计和校准的方法和系统

Method and system for offset estimation and alignment
Abstract:
A method for determining an offset vector. The method includes obtaining an image of a first feature. An image of a second feature is also obtained. Also, a combination image of the first feature and the second feature is obtained. A plurality of composite images is utilized to determine an accurate offset vector between the first feature and the second feature in the combination image. The plurality of composite images is based on the image of the first feature and the image of the second feature.
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