Invention Grant
- Patent Title: Probe system comprising an electric-field-aligned probe tip and method for fabricating the same
- Patent Title (中): 包括电场对准探针尖端的探针系统及其制造方法
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Application No.: US12088223Application Date: 2006-10-10
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Publication No.: US07735147B2Publication Date: 2010-06-08
- Inventor: Sungho Jin , Li-Han Chen , I-Chen Chen
- Applicant: Sungho Jin , Li-Han Chen , I-Chen Chen
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Lewis Brisbols Bisgaard & Smith LLP
- Agent Sanford Astor
- International Application: PCT/US2006/039824 WO 20061010
- International Announcement: WO2007/047337 WO 20070426
- Main IPC: H01J37/06
- IPC: H01J37/06

Abstract:
A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.
Public/Granted literature
- US20080272299A1 Probe System Comprising an Electric-Field-Aligned Probe Tip and Method for Fabricating the Same Public/Granted day:2008-11-06
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