Invention Grant
US07737385B2 Selective reflectivity process chamber with customized wavelength response and method
有权
选择性反射处理室,具有定制的波长响应和方法
- Patent Title: Selective reflectivity process chamber with customized wavelength response and method
- Patent Title (中): 选择性反射处理室,具有定制的波长响应和方法
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Application No.: US11506174Application Date: 2006-08-16
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Publication No.: US07737385B2Publication Date: 2010-06-15
- Inventor: Paul J. Timans , Daniel J. Devine , Young Jai Lee , Yao Zhi Hu , Peter C. Bordiga
- Applicant: Paul J. Timans , Daniel J. Devine , Young Jai Lee , Yao Zhi Hu , Peter C. Bordiga
- Applicant Address: US CA Fremont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Pritzkau Patent Group LLC
- Main IPC: F27B5/14
- IPC: F27B5/14 ; F26B19/00

Abstract:
A customizable chamber spectral response is described which can be used at least to tailor chamber performance for wafer heating, wafer cooling, temperature measurement, and stray light. In one aspect, a system is described for processing a treatment object having a given emission spectrum at a treatment object temperature which causes the treatment object to produce a treatment object radiated energy. The chamber responds in a first way to the heating arrangement radiated energy and in a second way to the treatment object radiated energy that is incident thereon. The chamber may respond in the first way by reflecting the majority of the heat source radiated energy and in the second way by absorbing the majority of the treatment object radiated energy. Different portions of the chamber may be treated with selectively reflectivity based on design considerations to achieve objectives with respect to a particular chamber performance parameter.
Public/Granted literature
- US20070131671A1 Selective reflectivity process chamber with customized wavelength response and method Public/Granted day:2007-06-14
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