Invention Grant
US07737501B2 FinFET SRAM with asymmetric gate and method of manufacture thereof
有权
具有非对称栅极的FinFET SRAM及其制造方法
- Patent Title: FinFET SRAM with asymmetric gate and method of manufacture thereof
- Patent Title (中): 具有非对称栅极的FinFET SRAM及其制造方法
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Application No.: US11776118Application Date: 2007-07-11
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Publication No.: US07737501B2Publication Date: 2010-06-15
- Inventor: Huilong Zhu , Haining S. Yang
- Applicant: Huilong Zhu , Haining S. Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Graham S. Jones; H. Daniel Schnurmann
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L21/336

Abstract:
A FinFET SRAM transistor device includes transistors formed on fins with each transistor including a semiconductor channel region within a fin plus a source region and a drain region extending within the fin from opposite sides of the channel region with fin sidewalls having a gate dielectric formed thereon. Bilateral transistor gates extend from the gate dielectric. An asymmetrically doped FinFET transistor has source/drain regions doped with a first dopant type, but the asymmetrically doped FinFET transistor include at least one of the bilateral transistor gate electrode regions on one side of at least one of the fins counterdoped with respect to the first dopant type. The finFET transistors are connected in a six transistor SRAM circuit including two PFET pull-up transistors, two NFET pull down transistors and two NFET passgate transistors.
Public/Granted literature
- US20090014798A1 FINFET SRAM WITH ASYMMETRIC GATE AND METHOD OF MANUFACTURE THEREOF Public/Granted day:2009-01-15
Information query
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