Invention Grant
- Patent Title: Semiconductor constructions
- Patent Title (中): 半导体结构
-
Application No.: US11591017Application Date: 2006-10-31
-
Publication No.: US07737559B2Publication Date: 2010-06-15
- Inventor: John Smythe
- Applicant: John Smythe
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Well St. John, P.S.
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/52 ; H01L23/48

Abstract:
The invention includes methods of forming layers conformally over undulating surface topographies associated with semiconductor substrates. The undulating surface topographies can first be exposed to one or more of titanium oxide, neodymium oxide, yttrium oxide, zirconium oxide and vanadium oxide to treat the surfaces, and can be subsequently exposed to a material that forms a layer conformally along the treated surfaces. The material can, for example, comprise an aluminum-containing compound and one or both of silane and silazane. The invention also includes semiconductor constructions having conformal layers formed over liners containing one or more of titanium oxide, yttrium oxide, zirconium oxide and vanadium oxide.
Public/Granted literature
- US20070049004A1 Semiconductor constructions, and methods of forming layers Public/Granted day:2007-03-01
Information query
IPC分类: