Invention Grant
- Patent Title: Flow sensor element and its self-cleaning
- Patent Title (中): 流量传感器元件及其自洁性
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Application No.: US12108878Application Date: 2008-04-24
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Publication No.: US07739908B2Publication Date: 2010-06-22
- Inventor: Karlheinz Wienand , Karlheinz Ullrich , Matthias Muziol
- Applicant: Karlheinz Wienand , Karlheinz Ullrich , Matthias Muziol
- Applicant Address: DE Hanau
- Assignee: Heraeus Sensor Technology GmbH
- Current Assignee: Heraeus Sensor Technology GmbH
- Current Assignee Address: DE Hanau
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: DE102005051182 20051024; DE102006030786 20060630
- Main IPC: G01F1/68
- IPC: G01F1/68

Abstract:
A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.
Public/Granted literature
- US20080264166A1 FLOW SENSOR ELEMENT AND ITS SELF-CLEANING Public/Granted day:2008-10-30
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