Invention Grant
- Patent Title: High-quality CMOS image sensor and photo diode
- Patent Title (中): 高质量CMOS图像传感器和光电二极管
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Application No.: US11872922Application Date: 2007-10-16
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Publication No.: US07741665B2Publication Date: 2010-06-22
- Inventor: Jin Yeong Kang , Jin Gun Koo , Sang Heung Lee
- Applicant: Jin Yeong Kang , Jin Gun Koo , Sang Heung Lee
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Ladas & Parry LLP
- Priority: KR10-2006-0104179 20061025
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113

Abstract:
Provided are a high-quality CMOS image sensor and a photo diode, which can be fabricated in sub-90 nm regime using nanoscale CMOS technology. The photo diode includes: a p-type well; an internal n-type region formed under a surface of the p-type well; and a surface p-type region including a highly doped p-type SiGeC epitaxial layer or a polysilicon layer deposited on a top surface of the p-type well over the internal n-type region. The image sensor includes: a photo diode including an internal n-type region and a surface p-type region; a transfer transistor for transmitting photo-charges generated in the photo diode to a floating diffusion node; and a driving transistor for amplifying a variation in an electric potential of the floating diffusion node due to the photo-charges. The image sensor further includes a floating metal layer for functioning as the floating diffusion node and applying an electric potential from a drain of the transfer transistor to a gate of the driving transistor.
Public/Granted literature
- US20080105905A1 HIGH-QUALITY CMOS IMAGE SENSOR AND PHOTO DIODE Public/Granted day:2008-05-08
Information query
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