Invention Grant
US07741755B2 Recess-protrusion structure body, process for producing the same, piezoelectric device, and ink jet type recording head 有权
凹凸结构体,其制造方法,压电装置和喷墨式记录头

  • Patent Title: Recess-protrusion structure body, process for producing the same, piezoelectric device, and ink jet type recording head
  • Patent Title (中): 凹凸结构体,其制造方法,压电装置和喷墨式记录头
  • Application No.: US11586706
    Application Date: 2006-10-26
  • Publication No.: US07741755B2
    Publication Date: 2010-06-22
  • Inventor: Takamichi Fujii
  • Applicant: Takamichi Fujii
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Birch, Stewart, Kolasch & Birch, LLP
  • Priority: JP2005-314229 20051028; JP2006-246543 20060912
  • Main IPC: H01L41/08
  • IPC: H01L41/08
Recess-protrusion structure body, process for producing the same, piezoelectric device, and ink jet type recording head
Abstract:
In a step (A), a selectively removable resist layer or a selectively removable sacrifice layer is formed in a predetermined pattern in a protrusion non-forming region on a base plate. In a step (B), a pillar-shaped structure film is formed on a side of the base plate, on which side the resist layer or the sacrifice layer has been formed in the predetermined pattern. The pillar-shaped structure film contains a plurality of pillar-shaped bodies, each of which extends in a direction nonparallel with a base plate surface of the base plate. In a step (C), the resist layer or the sacrifice layer, and a region of the pillar-shaped structure film, which region is located on the resist layer or the sacrifice layer, are removed by use of a lift-off technique. At least one protruding region, which contains the pillar-shaped bodies, is thus formed.
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